JPH02441Y2 - - Google Patents

Info

Publication number
JPH02441Y2
JPH02441Y2 JP1983123297U JP12329783U JPH02441Y2 JP H02441 Y2 JPH02441 Y2 JP H02441Y2 JP 1983123297 U JP1983123297 U JP 1983123297U JP 12329783 U JP12329783 U JP 12329783U JP H02441 Y2 JPH02441 Y2 JP H02441Y2
Authority
JP
Japan
Prior art keywords
chamber
sputtering
speed
take
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983123297U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6032363U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12329783U priority Critical patent/JPS6032363U/ja
Publication of JPS6032363U publication Critical patent/JPS6032363U/ja
Application granted granted Critical
Publication of JPH02441Y2 publication Critical patent/JPH02441Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12329783U 1983-08-10 1983-08-10 インライン式スパツタリング装置 Granted JPS6032363U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12329783U JPS6032363U (ja) 1983-08-10 1983-08-10 インライン式スパツタリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12329783U JPS6032363U (ja) 1983-08-10 1983-08-10 インライン式スパツタリング装置

Publications (2)

Publication Number Publication Date
JPS6032363U JPS6032363U (ja) 1985-03-05
JPH02441Y2 true JPH02441Y2 (en]) 1990-01-08

Family

ID=30281504

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12329783U Granted JPS6032363U (ja) 1983-08-10 1983-08-10 インライン式スパツタリング装置

Country Status (1)

Country Link
JP (1) JPS6032363U (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011032508A (ja) * 2009-07-30 2011-02-17 Tohoku Univ 配線基板プラズマ処理装置及び配線基板の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3904506A (en) * 1972-11-13 1975-09-09 Shatterproof Glass Corp Apparatus for continuous production of sputter-coated glass products
US4042128A (en) * 1975-11-26 1977-08-16 Airco, Inc. Substrate transfer apparatus for a vacuum coating system

Also Published As

Publication number Publication date
JPS6032363U (ja) 1985-03-05

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